Proposing highly sophisticated robot seals.

As applications for clean/vacuum robots become more diverse, Rigaku's rotary feedthrough units are constantly being designed to satisfy customer specifications.

Thanks to Rigaku's advanced technologies, the center deviation has been reduced to support positioning accuracy for large-size FPD substrates and semiconductor wafers. Rigaku aims to satisfy diverse customer needs such as those with pressure differential seals or bellows seals (linear reciprocating motion).

• Satisfying customer needs with tip displacement-free, high-precision, multi-axial seals combined with high-precision processing technologies developed with Rigaku X-ray diffractometers.
• The unique magnetic circuit, free from magnetic field interference between the seals, makes multi-axial seals compact.
• High-precision technologies for producing powerful magnets and pole pieces enable the manufacture of large seals with a diameter of 100 mm or more.
• Thin, dustproof seals that can withstand pressure differentials of 20 kPa or less can be manufactured.

Note

Offering rotary feedthroughs that can withstand high-temperature insert gas.

We are providing many magnetic seals for large CVD equipment manufacturing companies for a long time.

Many companies are choosing our magnetic seals officially.

After considerable research and testing, Rigaku has succeeded in developing a new magnetic fluid that generates hardly any gas at high temperatures.

This new magnetic fluid and the improved rotary feedthrough structure extends the service life of the rotary feedthrough unit under service conditions that are regarded as being impossible for the seals used in CVD equipment.

Even, smooth rotation contributes to the formation of a film with a uniform thickness.

Suitable seals for CVD equipment

Corrosive gases are used in almost CVD equipment. So, we recommend adopting magnetic seals of cantilever series, FMB-C, F1B-C and F1T-C. They have no bearing in the process side.

Typeical magnetic seal suitable for CVD equipment

Excellent magnetic field resistance

Pulling up crystal ingots exceeding 300 mm in diameter requires a powerful magnetic field, such as in the case of the MCZ method, the cusped magnetic field method, and so on. The rotary feedthroughs used with these methods should not be affected by the magnetic field. Rigaku's unique rotary feedthrough structure, which is resistant to magnetic fields, has been proven effective in applications involving the pulling up of ingots with a diameter of 400 mm at SSi.

Suitable seals for Single crystal growth equipment

In Single crystal growth equipment we recommend adopting magnetic seals of standard series, NFT-B and F1T-B. They have only basic sealing functions.

We have experience of making magnetic seals which is required to rotate with accuracy holding crucible and winding up equipment.

Developing rotary feedthroughs that can satisf a wide range of specifications

A range of specifications and processing methods for use in etching systems, such as those for inert gas, high temperature, high-speed rotation, plasma, electrodes, iron beams, strong magnetic fields, and leakage of magnetic flux.

Rigaku's rotary feedthroughs continue to rise to any challenge, with the aim of covering every area in which conventional rotary feedthroughs are thought to be unusable.

Corresponding to the high-vacuum and the high-speed rotating in Epitaxial growth system

In Epitaxial growth system, a crystalline film is grown on a substrate which is rotated at the high-speed in the high vacuum atmosphere.

Suitable seals for Epitaxial growth system

Transmitting high-speed rotating while minimizing center distortion and resonance

• Rigaku's unique technologies enable high-speed rotation while suppressing resonance.
• Long service life with less center distortion even with high-temperature, high-vacuum, and high-load applications.
• Rigaku can manufacture rotary feedthrough units for use in all types of ion implanter.

Suitable seals for Ion implanter

Magnetic seal is used at high rotation speed in almost Ion implanter. So, we recommend adopting magnetic seals of cantilever series, FMB-C, F1B-C and F1T-C. They have no bearing in the vacuum side. Additionally, water cooling should be adopted to avoid heating up of a magnetic seal at high speed rotation.

Magnetic seal is used at high rotation speed in almost Ion implanter. So, we recommend adopting magnetic seals of cantilever series, FMB-C, F1B-C and F1T-C. They have no bearing in the vacuum side. Additionally, water cooling should be adopted to avoid heating up of a magnetic seal at high speed rotation.

Please be careful about temperature range and gas of environment when you choose magnetic seals.

Please tell us required shape and load from here, if Standard series do not meet your requirement.

We will advise you the best solution.

Provides the vacuum rotary feedthrough with low magnetic flux leakage

"A lot of Rigaku rotary feedthroughs have been adopted for the sputtering systems that form transparent conductive coatings and antireflective coatings necessary for manufacturing solar cells, touchscreens and FPD etc.

They can use for various types of equipments such as ion beam sputtering, magnetron sputtering, ECR plasma sputtering and reactive sputtering.

It has been thought that the magnetic flux leakage from the magnetic fluid seal unit cannot be avoided since it consists of magnets and magnetic materials.

Due to magnetic circuit configuration unique to Rigaku, there is almost no magnetic flux leakage from our rotary feedthroughs.

Suitable seals for sputtering systems

To avoid metal contamination, we can recommend FMB-C series and F1B-C which does not arrange bearing to a vacuum side.

Hollow shaft rotary feedthroughs can introduce not only rotary/linear motion but also electrical power and cooling water into vacuum system.

In that case, we can recommend F1T-C series.

You can ask for your own custom-made design. Please feel free to contact us.

Ideal for sample adsoption

Wafers can be adsorbed firmly without being scratched during transport, or and LCD glass substrates during high-speed rotation using a spin coater, etc.

Demand is gradually increasing for rotary feedthroughs for use in vacuum chucks because they offer the advantage of permitting vacuuming through them, thereby eliminating unnecessary space and, in addition, they can offer stable rotation.

Notes

Magnetic seals for Vacuum chucking are custom made products.

Please tell us chucked material, environment, temperature range, rotating speed, required shape, load and tolerance of size from here. We will advise you the best solution.

For a wide variety of furnaces besides the vacuum heat treating furnace

Quenching' is a process that a material is cooled rapidly by circulation of the high-pressure gas after it is held to high temperature in a vacuum furnace.

Many Rigaku products have been adopted as motion feedthrough of the fan for the circulating high-pressure gas.

The shaft with a high rigidity due to Rigaku's original seal design enables high-load capability and high torque transmission capability.

A typical feedthrough for the high-pressure furnace

Rigaku rotay feedthroughs have been running in the various types of industrial furnaces such as vacuum heat treating furnaces, sintering furnaces, carburizing furnaces and nitriding furnaces.

The drawing below is the production example of a rotary feedthrough which withstand differential pressure up to 0.9MPa.

The high-pressure type feedthrough is a custom-made product

If you have an interest in the application, please send us the specification via the inquiry form.

Contributer to protecting the environment through water treatment

Rigaku rotary feedthroughs are adopted for the shaft seal of the digester chamber which treats sewage sludge.

The rotary feedthrough prevents gases such as methane and hydrogen sulfide generated by digesting sewage sludge from leaking out of the chamber.

Moreover, it has saved the time and cost of maintenance work compared with the conventional water seal method.

For the shaft seal for mixing tank or reactor

Rigaku rotary feedthroughs are available to both negative pressure and positive pressure, the leakage is almost zero or ignorable. (He leak rate: less than 9.9x10-11Pa.m3/sec)

The rotary feedthroughs can be used for the shaft seals of stirred reactors, vacuum kneading machines and vacuum defoamers.

Since they do not wear out by friction like contact seals such as O-rings or gland packings, the product is not contaminated.

Furthermore, they do not need the maintenance work such as supplying the sealing fluid or tightening the gland nuts.

If you have an interest in the application, please send us the specification via the inquiry form.

Contributing to the analyzing of a crystal structure

X-ray is generated from high-speed rotating anode which is hit by a thermal electron Rigaku's rotary feedthroughs in the device.

Contributing to nanotechnology

A typical nanotechnology (ultrafine technology) material is the carbon nanotube.

One method of manufacturing nanotubes involves arc discharge, in which rotary feedthroughs are used.